Furnace-Sliding Long-Reactor CVD System for Mass-Production
MPCVD-Slide
Continuous CVD for Mass production
*Appearance and specifications are subject to change without notice.
| Outline: | The CVD system is designed for realizing mass-production by equipping a sliding furnace and a long reaction quartz tube (our original idea). A large amount of samples are set previously in the long reaction tube and then the furnace is continuously mowing along the quartz tube driven by motor, so that all samples are continuously CVD threated under the same CVD conditions. |
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