Rotational CVD System for Carbon-coating on Si Powder


Uniform treatment of powder samples

*Appearance and specifications are subject to change without notice.

Outline: The CVD system is designed for coating carbon film on powder Si material (usually used as negative electrode in Li battery). By rotating the reaction quartz tube during the CVD process, the powder sample will be stirred so that uniformed deposition of carbon films can be achieved.
  •  Quartz tube can be rotated with a motor-driven rotation unit.
  •  Rotation speed can be adjusted at different levels.
  •  Uniform carbon films can be deposited on powder Si or ceramic materials.
  •  Other functions will be similar to MPCVD-50.