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Thermal CVD system for graphene synthesis: MPCVD-Graphene

Thermal CVD system for graphene synthesis [MPCVD-Graphene] ----- JPY6,000,000~

Sample-heating (before sliding hot-zone of furnace)

Sample-cooling (after sliding hot-zone of furnace)
Purpose: A furnace type of thermal CVD system, equipped with a rapid heating/cooling mechanism, is designed for researchers go grow graphene films on substrates (Cu foils, etc.).
  • ・Furnace-sliding mechanism is equipped for rapid heating/cooling of samples.
  • ・A special thermocouple sensor is equipped for directly monitoring of the sample
  •  temperature.
  • ・3 lines of precise mass-flow gas controllers are equipped.
  • ・Compact size, steady chassis.
  • ・Other carbon nanomaterials (carbon nanotubes, carbon microcoils) can also be
  •  synthesized.

 This is a special thermal CVD system for synthesizing graphene films with a horizontal quartz tube furnace (diameter = 50mmφ). A catalyst substrate (usually Cu foil) is placed inside the furnace, and methane gas or acetylene gas is injected from the outside at a low flow rate and low pressure to form a graphene film on the catalyst foils.

 It has been known that the cooling speed is a key factor for forming high-quality graphene films. Rapid cooling suppresses the excess deposition of carbon from the catalytic metal foils (such as Cu or Ni foils).

 This system is equipped with a rapid cooling mechanism. The tube furnace slides 30 cm sideways to the reaction tube, and the hot zone of the furnace can be moved away from the sample. Shifting the hot zone rapidly cools the sample. This system realizes an extremely rapid cooling effect with a simple mechanism.


Configuration Tubular Furnace Operating Temp. 400~1000℃
Control of Temperature 1zone Program Control
Dimension W300㎜×H200㎜×D186㎜
Electric Capacitance 700W
Furnace Tube Material Quartz
Dimension OD50㎜×ID46㎜×L1200㎜
Control of Gases Mass Flow Controller
Introduced Gases Carrier Gas:N2 or Ar
Reducing Gas:H2
Hydrocarbon Gas:C2H2 or C2H4 or CH4
Vacuum Gauge Bourdon Gauge
Vacuum Pump Oil-sealed Rotary Vacuum Pump
Feed Mechanism for Liquid Fuel
Measuring Thermocouple into Furnace Tube
Slide Mechanism for rapid cooling(Sliding Width:250㎜)
Dimension W1400㎜×H1000㎜×D500㎜